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現代科(ke)學技(ji)術的(de)一個重(zhong)(zhong)要組成部分就是真空技(ji)術, 真空技(ji)術廣(guang)泛應用于(yu)國民經濟(ji)中的(de)各個領域里, 推(tui)動并促進(jin)了(le)科(ke)技(ji)研究和生產(chan)技(ji)術的(de)發(fa)展, 而真空測量是真空技(ji)術的(de)一個重(zhong)(zhong)要環節(jie)。

現在真空(kong)測(ce)(ce)量的(de)(de)(de)(de)傳感器, 大部(bu)分(fen)都是用(yong)電(dian)(dian)(dian)(dian)(dian)離規, 并(bing)且(qie)在中程真空(kong)范圍用(yong)途最廣泛。常(chang)用(yong)的(de)(de)(de)(de)電(dian)(dian)(dian)(dian)(dian)離真空(kong)規測(ce)(ce)量儀, 都采用(yong)模擬電(dian)(dian)(dian)(dian)(dian)路控(kong)(kong)制(zhi)發(fa)射(she)電(dian)(dian)(dian)(dian)(dian)流(liu)(liu), 并(bing)把(ba)它當成(cheng)固(gu)定(ding)數來運(yun)(yun)算(suan), 這(zhe)樣(yang)會產生(sheng)一些不(bu)(bu)足之處(chu), 例如: 由(you)于外界干(gan)(gan)擾(rao)或元器件老化造(zao)成(cheng)電(dian)(dian)(dian)(dian)(dian)流(liu)(liu)有偏差(cha); 或控(kong)(kong)制(zhi)環(huan)中的(de)(de)(de)(de)漂移產生(sheng)不(bu)(bu)穩定(ding), 由(you)此而導致(zhi)測(ce)(ce)量誤差(cha)較大。為消除(chu)此類不(bu)(bu)良現象, 我(wo)們應用(yong)現代控(kong)(kong)制(zhi)理論—PID和Fuzzy控(kong)(kong)制(zhi), 采用(yong)數字電(dian)(dian)(dian)(dian)(dian)路控(kong)(kong)制(zhi)發(fa)射(she)電(dian)(dian)(dian)(dian)(dian)流(liu)(liu), 控(kong)(kong)制(zhi)環(huan)中都用(yong)16位的(de)(de)(de)(de)高分(fen)辨率A/D和D/A,且(qie)把(ba)發(fa)射(she)電(dian)(dian)(dian)(dian)(dian)流(liu)(liu)測(ce)(ce)量值參入運(yun)(yun)算(suan), 允(yun)許發(fa)射(she)電(dian)(dian)(dian)(dian)(dian)流(liu)(liu)有一定(ding)的(de)(de)(de)(de)變化范圍。這(zhe)樣(yang)既(ji)提高了測(ce)(ce)量精度(du), 又在它們的(de)(de)(de)(de)線性區域(yu)內擴充(chong)量程。為保障(zhang)儀器正常(chang)運(yun)(yun)轉, 開機有自檢功能,運(yun)(yun)行有自我(wo)保護措施。若超量時,自動關掉規管電(dian)(dian)(dian)(dian)(dian)源, 并(bing)顯示“故障(zhang)”; 為防(fang)外界干(gan)(gan)擾(rao), 儀器中軟、硬(ying)件加(jia)有抗干(gan)(gan)擾(rao)措施。

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